Growth of (110)-one-axis-oriented perovskite-type oxide thin films with local epitaxy on (111)SrTiO3 single crystal substrates

Tomoya Sato, Takanori Kiguchi, Toyohiko J. Konno, Jun ichi Kimura, Daichi Ichinose, Takanori Mimura, Hiroshi Funakubo, Kiyoshi Uchiyama

Research output: Contribution to journalArticlepeer-review

Abstract

Thin films of BaCe0.8Y0.2O3-δ (BCYO) and SrZr0.8Y0.2O3-δ (SZYO) with a perovskite structure were deposited on (111)Pt//(111)SrTiO3 (STO) single crystal substrates by an RF-magnetron sputtering method. X-ray diffraction revealed that the BCYO and SZYO thin films were polycrystalline but highly (110)-one-axis oriented with local epitaxy on (111)Pt//(111)STO in the 110-direction. However, these films have six-fold symmetric domains and each domain showed in-plane rotations because of the lattice mismatches between (110)BCYO or (110)SZYO and (111)Pt. Especially, the BCYO film showed larger in-plane rotation than that of SZYO because of its larger lattice mismatch.

Original languageEnglish
Article numberSLLB01
JournalJapanese journal of applied physics
Volume58
Issue numberSL
DOIs
Publication statusPublished - 2019

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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