Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition

Akihiko Ito, Yu You, Hirokazu Katsui, Takashi Goto

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Ba β-alumina films were prepared by laser chemical vapor deposition. Mostly single-phase Ba β-alumina films were obtained at 1125-1200K and for an Al/Ba molar ratio of 12.4-16.6. BaAl2O4 and α-Al2O3 were codeposited with Ba β-alumina under Ba- and Al-rich conditions, respectively. The Ba β-alumina films consisted of hexagonal grains, and the (110)-oriented Ba β-alumina films had a fin-like columnar structure. The highest deposition rate reached 120μmh-1 at around 1200K. A thin layer of Ba-rich superstructure was formed on the surface of the (110)-oriented columnar grains.

Original languageEnglish
Pages (from-to)2655-2661
Number of pages7
JournalJournal of the European Ceramic Society
Volume33
Issue number13-14
DOIs
Publication statusPublished - 2013 Nov

Keywords

  • Ba β-alumina
  • Laser CVD
  • Microstructure
  • Oriented growth

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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