Abstract
Electrical characteristics of Si layers on SiO2 formed by seeded lateral solid phase epitaxy are evaluated using metal-oxide-semiconductor field-effect transistors (MOSFET's) fabricated in the layer. To evaluate the {110} and {111} facet grown areas separately, the locations of the MOSFET's are varied as a function of distance from the seeding region. Significant differences in electrical characteristics of the MOSFET's are observed depending on the single-crystal growth mode. A field-effect (electron) mobility of about 700 cm2/(V s) was obtained for n-channel MOSFET's fabricated in the {110} facet grown region. That for the {111} facet growth region was inadequate. The results indicate the possibility of applying the method for future three-dimensional device structures using a {110} facet grown region.
Original language | English |
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Pages (from-to) | 1681-1683 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 52 |
Issue number | 20 |
DOIs | |
Publication status | Published - 1988 Dec 1 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)