TY - JOUR
T1 - Grazing incidence X-ray absorption spectra of (Si/W)100/Si multilayer
AU - Hayashi, Kouichi
AU - Amano, Hiroyuki
AU - Yamamoto, Tokujiro
AU - Kawai, Jun
AU - Kitajima, Yoshinori
AU - Takenaka, Hisataka
N1 - Funding Information:
A part of this work was financially supported by the Grant-in-Aid for Scientific Research, Japan and also by the Shimadzu Science Foundation. This work was performed under the approval of the Photon Factory Program Advisory Committee.
PY - 1999/1/4
Y1 - 1999/1/4
N2 - Tungsten (W) MIII X-ray absorption spectra of a periodic multilayer, (Si/W)100Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W MIII absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W MIII absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.
AB - Tungsten (W) MIII X-ray absorption spectra of a periodic multilayer, (Si/W)100Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W MIII absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W MIII absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.
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U2 - 10.1016/S0584-8547(98)00210-9
DO - 10.1016/S0584-8547(98)00210-9
M3 - Article
AN - SCOPUS:0033521361
VL - 54
SP - 223
EP - 226
JO - Spectrochimica Acta - Part B Atomic Spectroscopy
JF - Spectrochimica Acta - Part B Atomic Spectroscopy
SN - 0584-8547
IS - 1
ER -