Grazing incidence X-ray absorption spectra of (Si/W)100/Si multilayer

Kouichi Hayashi, Hiroyuki Amano, Tokujiro Yamamoto, Jun Kawai, Yoshinori Kitajima, Hisataka Takenaka

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Tungsten (W) MIII X-ray absorption spectra of a periodic multilayer, (Si/W)100Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W MIII absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W MIII absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.

Original languageEnglish
Pages (from-to)223-226
Number of pages4
JournalSpectrochimica acta, Part B: Atomic spectroscopy
Volume54
Issue number1
DOIs
Publication statusPublished - 1999 Jan 4

ASJC Scopus subject areas

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Spectroscopy

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