Grazing incidence X-ray absorption spectra of (Si/W)100/Si multilayer

Kouichi Hayashi; Hiroyuki Amano; Tokujiro Yamamoto; Jun Kawai; Yoshinori Kitajima; Hisataka Takenaka

doi:10.1016/S0584-8547(98)00210-9

Grazing incidence X-ray absorption spectra of (Si/W)₁₀₀/Si multilayer

Kouichi Hayashi, Hiroyuki Amano, Tokujiro Yamamoto, Jun Kawai, Yoshinori Kitajima, Hisataka Takenaka

Materials Development Division

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Tungsten (W) M_III X-ray absorption spectra of a periodic multilayer, (Si/W)₁₀₀Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W M_III absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W M_III absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.

Original language	English
Pages (from-to)	223-226
Number of pages	4
Journal	Spectrochimica acta, Part B: Atomic spectroscopy
Volume	54
Issue number	1
DOIs	https://doi.org/10.1016/S0584-8547(98)00210-9
Publication status	Published - 1999 Jan 4

ASJC Scopus subject areas

Analytical Chemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Spectroscopy

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title = "Grazing incidence X-ray absorption spectra of (Si/W)100/Si multilayer",

abstract = "Tungsten (W) MIII X-ray absorption spectra of a periodic multilayer, (Si/W)100Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W MIII absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W MIII absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.",

author = "Kouichi Hayashi and Hiroyuki Amano and Tokujiro Yamamoto and Jun Kawai and Yoshinori Kitajima and Hisataka Takenaka",

note = "Funding Information: A part of this work was financially supported by the Grant-in-Aid for Scientific Research, Japan and also by the Shimadzu Science Foundation. This work was performed under the approval of the Photon Factory Program Advisory Committee. ",

year = "1999",

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doi = "10.1016/S0584-8547(98)00210-9",

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T1 - Grazing incidence X-ray absorption spectra of (Si/W)100/Si multilayer

AU - Hayashi, Kouichi

AU - Amano, Hiroyuki

AU - Yamamoto, Tokujiro

AU - Kawai, Jun

AU - Kitajima, Yoshinori

AU - Takenaka, Hisataka

N1 - Funding Information: A part of this work was financially supported by the Grant-in-Aid for Scientific Research, Japan and also by the Shimadzu Science Foundation. This work was performed under the approval of the Photon Factory Program Advisory Committee.

PY - 1999/1/4

Y1 - 1999/1/4

N2 - Tungsten (W) MIII X-ray absorption spectra of a periodic multilayer, (Si/W)100Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W MIII absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W MIII absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.

AB - Tungsten (W) MIII X-ray absorption spectra of a periodic multilayer, (Si/W)100Si, were measured with the change of X-ray grazing angle using sample current method. Under not total reflection condition, the absorbance changed little except at W MIII absorption edge. While under the total reflection condition, the absorbance increased with the increase of the X-ray energy and the increment changed from low to high at the W MIII absorption edge. This result reflected the variation of the X-ray evanescent wavelength caused by the absorption effect of W.

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