Grazing-incidence ultrasmall-angle X-ray scattering imaging with X-ray transmission gratings: A feasibility study

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5 Citations (Scopus)

Abstract

X-ray grating interferometry has been spotlighted in the last decade as a technique for X-ray phase imaging and tomography. In this paper, we report that this interferometry can also be applied to the real-space mapping of weak diffuse scattering (ultrasmall-angle X-ray scattering) in grazing incidence geometry. A preliminary experiment using a laboratory X-ray source demonstrated that image contrast is successfully generated by the diffuse scattering from a micrometer-sized structure fabricated on a silicon wafer. This technique works with a large beam with a wide angular spread from a low-brilliance X-ray source, and has potential to become a powerful tool for mapping structures in real space from which ultrasmall-angle X-ray scattering arises.

Original languageEnglish
Article number05FH04
JournalJapanese journal of applied physics
Volume53
Issue number5 SPEC. ISSUE 1
DOIs
Publication statusPublished - 2014 May

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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