Grating-coupled light emission from the slow mode of metal-insulator-metal tunnel junctions

Sukekatsu Ushioda, Yoichi Uehara, Masatoshi Takada, Koji Otsubo, Junichi Murota

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18 Citations (Scopus)


We have observed the direct light emission from the slow mode of surface plasmon polaritons (SPP) of metal-insulator-metal (MIM) tunnel junctions formed on a ultra-fine grating. The grating (period=100 nm, groove depth=12 nm, area=200 µm×200 µm) was created on a Si(100) wafer, using a direct electron beam lithography technique and wet etching of SiO2 The MIM junction was formed by evaporation of Al and Au films on this grating. The emission peak for the Al-Oxide-Au junction was observed at 1.55 eV that is expected from the dispersion curve of the slow mode. The spectral width is appreciably narrower than the emission due to the natural residual micro-roughness of the junction.

Original languageEnglish
Pages (from-to)L870-L873
JournalJapanese journal of applied physics
Issue number7
Publication statusPublished - 1992 Jul
Externally publishedYes


  • Electron beam lithography
  • Light emitting tunnel junction
  • Si
  • Surface plasmon
  • Ultra-fine grating

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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