Graphene nano-ribbon-base highly sensitive pressure sensor using area-arrayed pillar structure

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A novel highly sensitive pressure sensor was proposed in this paper. It has high flexibility (wearable) and modularization fabrication ability (high productivity and low cost). The proposed sensor structure was combined with two sections: a stress-concentration section and a stress-detecting section. The stress-concentration section has been successfully developed using PDMS patterned and copied from SU-8 micro structure, and the quality of the section was optimized by experiment of parameters matrix. The fabrication process of the stress-detecting section was also developed. Young's modulus of the PDMS thin film, which is the main part of the pressure sensor, was measured by using a nano-indenter.

Original languageEnglish
Title of host publicationIMPACT 2017 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, Proceedings
PublisherIEEE Computer Society
Pages46-49
Number of pages4
ISBN (Electronic)9781538647196
DOIs
Publication statusPublished - 2017 Jul 1
Event12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017 - Taipei, Taiwan, Province of China
Duration: 2017 Oct 252017 Oct 27

Publication series

NameProceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
Volume2017-October
ISSN (Print)2150-5934
ISSN (Electronic)2150-5942

Other

Other12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017
CountryTaiwan, Province of China
CityTaipei
Period17/10/2517/10/27

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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