Grain growth mechanism of Cu thin films

Masanori Murakami, Miki Moriyama, Susumu Tsukimoto, Kazuhiro Ito

    Research output: Contribution to journalArticlepeer-review

    12 Citations (Scopus)

    Abstract

    Since Cu was found to be attractive as interconnect materials for ultra-large scale integrated (ULSI) Si devices, the electrical properties of Cu films have been extensively studied to prepare low resistance films. It was found in our previous papers that reduction of the electrical resistance of the Cu films was achieved by increasing grain sizes of the Cu films and large-grained Cu films were essential for the low resistance Cu interconnects. The primary factor to increase the grain sizes was also found to be intrinsic and/or extrinsic strain (or stress) introduced into the films. The present paper addresses the driving force of the grain growth of the Cu thin films based on the strain energy criterion model.

    Original languageEnglish
    Pages (from-to)1737-1740
    Number of pages4
    JournalMaterials Transactions
    Volume46
    Issue number7
    DOIs
    Publication statusPublished - 2005 Jul

    Keywords

    • Copper thin film
    • Grain growth
    • Strain energy

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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