Since the operating condition of thermal power plants has become harsher for minimizing the emission of CO2, Ni-based superalloys, such as Alloy 617 and 625, have been used in the plants to replace the conventional ferritic materials. Unfortunately, the increase of coefficient of thermal expansion compared with conventional steels is a concern. In addition, Ni-based superalloys have to suffer creep-fatigue random loading because thermal power plants have to compensate the random output of various renewable energies. It was found that the lifetime of Ni-based superalloys under creep-fatigue loading was much shorter than that under simple fatigue or creep loading. Thus, it has become very important to clarify the crack mechanism and establish the quantitative theory for estimating their lifetime under various loading conditions at elevated temperatures. Thus, the elucidation of the initial damage mechanism of Alloy 625 under various loading is indispensable. Hence, the initial cracking mechanism of Alloy 625 at grain boundaries under creep loading was investigated experimentally. The creep test was applied to small specimens in Argon atmosphere. The change of the micro texture during the creep test was observed by using SEM. It was confirmed that all the initial cracks appeared at certain grain boundaries. The change of the crystallinity was observed by EBSD (Electron Back-Scatter Diffraction) analysis quantitatively. It was found that the local accumulation of dislocations at the cracked grain boundaries caused the initial cracks at those grain boundaries. The initiation of cracks appeared clearly between two grains which had difference of KAM (Kernel Average Misorientation) values larger than 0.2. Therefore, dislocations were accumulated at one side of the grain boundary. By measuring the KAM values near grain boundaries, the appearance of initial cracks can be predicted approximately.