Graded composition and valence states in self-forming barrier layers at Cu-Mn/ SiO2 interface

Y. Otsuka, J. Koike, H. Sako, K. Ishibashi, N. Kawasaki, S. M. Chung, I. Tanaka

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44 Citations (Scopus)

Abstract

A self-forming diffusion barrier (SFB) layer was formed at Cu-Mn/ SiO 2 interface. Spatial variation of the chemical composition and valence state of the elements in the SFB was investigated in a subnanometer resolution using electron energy loss spectroscopy and transmission electron microscopy. The SFB was found to have a layered structure with graded compositions of nanocrystalline MnO and amorphous MnSiO3. The valence state of Mn was found to be +2 in the MnO layer and gradually increased to +3 in the MnSiO3 layer. The reported dielectric constant of the SFB could be explained by the observed composition and microstructure.

Original languageEnglish
Article number012101
JournalApplied Physics Letters
Volume96
Issue number1
DOIs
Publication statusPublished - 2010

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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