Glow-discharge cleaning in oxygen of carbon-contaminated optical elements

Tsuneharu Koide; Mihiro Yanagihara; Yoshihiro Aiura; Shigeru Sato; Hiroo Kato; Hirohito Fukutani

doi:10.1088/0031-8949/35/3/015

Glow-discharge cleaning in oxygen of carbon-contaminated optical elements

Tsuneharu Koide, Mihiro Yanagihara, Yoshihiro Aiura, Shigeru Sato, Hiroo Kato, Hirohito Fukutani

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Carbon-contaminated mirrors and gratings have been cleaned by a d.c. glow discharge in oxygen. The reflectance of mirrors and the efficiency of gratings were measured in situ before and after cleaning in the photon-energy range 4 ∼ 40 eV or 100 ∼ 1000 eV using reflectrometers which incorporated a discharge electrode. Angle-resolved scattering of mirrors and diffraction patterns of gratings were also measured. The mirror reflectance was restored to that of original mirror materials and the scattering level was reduced rather than increased by the discharge cleaning. The grating efficiency of the inside first order was drastically improved by cleaning, even by nearly an order of magnitude in some energy regions. Furthermore, the effect of a blaze was shown to be recovered by examining changes in the efficiencies of other orders as well.

Original language	English
Pages (from-to)	313-317
Number of pages	5
Journal	Physica Scripta
Volume	35
Issue number	3
DOIs	https://doi.org/10.1088/0031-8949/35/3/015
Publication status	Published - 1987 Mar 1

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Mathematical Physics
Condensed Matter Physics

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10.1088/0031-8949/35/3/015

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abstract = "Carbon-contaminated mirrors and gratings have been cleaned by a d.c. glow discharge in oxygen. The reflectance of mirrors and the efficiency of gratings were measured in situ before and after cleaning in the photon-energy range 4 ∼ 40 eV or 100 ∼ 1000 eV using reflectrometers which incorporated a discharge electrode. Angle-resolved scattering of mirrors and diffraction patterns of gratings were also measured. The mirror reflectance was restored to that of original mirror materials and the scattering level was reduced rather than increased by the discharge cleaning. The grating efficiency of the inside first order was drastically improved by cleaning, even by nearly an order of magnitude in some energy regions. Furthermore, the effect of a blaze was shown to be recovered by examining changes in the efficiencies of other orders as well.",

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T1 - Glow-discharge cleaning in oxygen of carbon-contaminated optical elements

AU - Koide, Tsuneharu

AU - Yanagihara, Mihiro

AU - Aiura, Yoshihiro

AU - Sato, Shigeru

AU - Kato, Hiroo

AU - Fukutani, Hirohito

PY - 1987/3/1

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AB - Carbon-contaminated mirrors and gratings have been cleaned by a d.c. glow discharge in oxygen. The reflectance of mirrors and the efficiency of gratings were measured in situ before and after cleaning in the photon-energy range 4 ∼ 40 eV or 100 ∼ 1000 eV using reflectrometers which incorporated a discharge electrode. Angle-resolved scattering of mirrors and diffraction patterns of gratings were also measured. The mirror reflectance was restored to that of original mirror materials and the scattering level was reduced rather than increased by the discharge cleaning. The grating efficiency of the inside first order was drastically improved by cleaning, even by nearly an order of magnitude in some energy regions. Furthermore, the effect of a blaze was shown to be recovered by examining changes in the efficiencies of other orders as well.

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Glow-discharge cleaning in oxygen of carbon-contaminated optical elements

Abstract

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