Generation and extinction characteristics of negative ions in pulse-time-modulated electron cyclotron resonance chlorine plasma

T. Mieno, S. Samukawa

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

The time dependence of plasma parameters in a pulse-time-modulated electron cyclotron resonance plasma of Cl2 and Ar source gases is measured. It is found that Cl2 plasma produces a large quantity of negative ions during afterglow and decay times of electron density, electron temperature and sheath potential of Cl2 plasma are much smaller than those of Ar plasma. The negative ions in Cl2 plasma stay for a long time in the afterglow and they quickly become extinct when the microwave power is turned on. These characteristics suggest that the pulse modulation of Cl2 plasma produces a large amount of negative ions and changes the flow of charged particles through the sheath region to the substrate surface, which enables us to improve highly anisotropic and charge-free poly-Si etching.

Original languageEnglish
Pages (from-to)398-404
Number of pages7
JournalPlasma Sources Science and Technology
Volume6
Issue number3
DOIs
Publication statusPublished - 1997 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics

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