Gecko inspired electrostatic chuck

Jose Berengueres, Masataka Urago, Shigeki Saito, Kenjiro Tadakuma, Hiroyuki Meguro

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

Abstract

We introduce a climbing system, inspired by gecko foot that uses Electrostatic Chuck (ESC) in place of Van der Waals interaction. Electrostatic chucks are currently used in wafer foundries to pick-up and move delicate thin semiconductor wafers. The properties of ESC make it an interesting adhesion force for wall mobility applications. However the great dependency of current ESCs' adhesion force on the surface roughness of the substrate renders them ineffective in "normal-roughness" walls. By combining ESC adhesion with gecko's foot-hair surface-roughness adaptability function we propose a device for wall mobility applications.

Original languageEnglish
Title of host publication2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006
Pages1018-1023
Number of pages6
DOIs
Publication statusPublished - 2006 Dec 1
Externally publishedYes
Event2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006 - Kunming, China
Duration: 2006 Dec 172006 Dec 20

Publication series

Name2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006

Other

Other2006 IEEE International Conference on Robotics and Biomimetics, ROBIO 2006
CountryChina
CityKunming
Period06/12/1706/12/20

Keywords

  • Climbing
  • Distributed adhesion
  • ESC
  • Electrostatic chuck
  • Gecko
  • Surface roughness
  • Van der Waals force
  • Wall

ASJC Scopus subject areas

  • Artificial Intelligence
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Gecko inspired electrostatic chuck'. Together they form a unique fingerprint.

Cite this