Gas-permeable templates using cellulose derivatives with acrylate and methacrylate groups for reducing in void defect density in ultraviolet nanoimprint lithography

Shinya Nakajima, Satoshi Takei, Soichiro Takamatsu, Kento Mizui, Toshitaka Oka, Yoko Matsumoto, Atsushi Sekiguchi, Makoto Hanabata

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy