GaN microring waveguide bonded to Si substrate by polymer

R. Hashida, T. Sasaki, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Hybrid integration of GaN and Si photonic devices is promising. Using a polymer bonding technique, GaN microring resonators are fabricated on Si substrate. Transmission characteristics of the GaN microring is measured.

Original languageEnglish
Title of host publication2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781538607374
DOIs
Publication statusPublished - 2017 Sep 26
Event22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Santa Fe, United States
Duration: 2017 Aug 132017 Aug 17

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017
CountryUnited States
CitySanta Fe
Period17/8/1317/8/17

Keywords

  • GaN waveguide
  • Si photonics
  • polymer bonding

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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