Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer

Yasuhiro Takaya, Hiroki Shimizu, Satoru Takahashi, Takashi Miyoshi

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Abstract

The nano-CMM as a coordinate measuring machine for micron-sized 3-D shapes is required to satisfy the measuring range of about a cubic centimetre and the accuracy of less than 50 nm. In order to develop such a nano-CMM, the probe with a microsphere must achieve detecting accuracy of nanometre order and a contact pressure force of less than 10 N. In this paper, a new probe technique for nano-CMM using a laser trapped microsphere is proposed. The principle of measurement based on the laser trapping technique and the microscope interferometer is presented. Computer simulations of radiation pressure force are performed to develop the laser trapping probe experimental system. Three-dimensional trapping of a microsphere is achieved. The contact position is estimated by measuring the displacement of the microsphere.

Original languageEnglish
Pages (from-to)9-18
Number of pages10
JournalMeasurement: Journal of the International Measurement Confederation
Volume25
Issue number1
DOIs
Publication statusPublished - 1999

Keywords

  • Laser trapping probe
  • Micro-parts
  • Mirau microscope interferometer
  • Nano-CMM

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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