Fundamental studies on scanning electron-beam dielectric microscopy

Fundamental studies on scanning electron-beam dielectric microscopy are elucidated. This microscopy is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source instead of a light source of a photothermal dielectric microscope. This microscopy, with the abilities of in situ observations of SEM images and material compositions, has an intrinsic resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO₂ and Bi₂Ti₄O₁₁ is measured.