Fundamental studies on scanning electron-beam dielectric microscopy

Yasuo Cho, Kazuhiko Yamanouchi

Research output: Contribution to journalArticlepeer-review

Abstract

Fundamental studies on scanning electron-beam dielectric microscopy are elucidated. This microscopy is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source instead of a light source of a photothermal dielectric microscope. This microscopy, with the abilities of in situ observations of SEM images and material compositions, has an intrinsic resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO2 and Bi2Ti4O11 is measured.

Original languageEnglish
Pages (from-to)5349-5352
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number9 PART B
DOIs
Publication statusPublished - 1998 Sep

Keywords

  • Dielectric ceramics
  • Dielectric temperature coefficient
  • Electron-beam dielectric microscopy
  • Microscopic observation
  • Photothermal dielectric microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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