Abstract
Fundamental studies on scanning electron-beam dielectric microscopy are elucidated. This microscopy is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source instead of a light source of a photothermal dielectric microscope. This microscopy, with the abilities of in situ observations of SEM images and material compositions, has an intrinsic resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO2 and Bi2Ti4O11 is measured.
Original language | English |
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Pages (from-to) | 5349-5352 |
Number of pages | 4 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 37 |
Issue number | 9 PART B |
DOIs | |
Publication status | Published - 1998 Sep |
Keywords
- Dielectric ceramics
- Dielectric temperature coefficient
- Electron-beam dielectric microscopy
- Microscopic observation
- Photothermal dielectric microscopy
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)