Fundamental properties and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films

Kana Takenaka, Noriko Saidoh, Nobuyuki Nishiyama, Akihisa Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With the aim of investigating fundamental properties and nano-imprintabilities of glassy alloy in the film form, Zr 49Al 11Ni 8Cu 32, Pd 39Cu 29Ni 13P 19 and Cu 38Zr 47Al 9Ag 6 alloy thin films were fabricated on Si substrate by a magnetron sputtering method. These thin films exhibit distinct glass-tradition phenomenon and large supercooled liquid region of about 80 K, confirming as a glassy structure and have very smooth surface and sufficient hardness to maintain imprinted shape, which are suitable for nano-imprint processing. Moreover, thermal nano-imprintabilies of these obtained films are demonstrated by using a dot array mold with a dot diameter of 90 nm and a pitch of 180 nm. Surface observations revealed that periodic nano-hole arrays were successfully imprinted on the surface of these films and precisely corresponded to the periodic dot pattern of the mold. Particularly, Pd-based glassy alloy thin film indicated more precise pattern imprintabiliry, namely, more flat residual surface plane and sharper hole edge. These results suggest that these glassy alloy thin films, especially Pd-based glassy alloy thin film have high potential for application to the nano-imprinting materials.

Original languageEnglish
Title of host publicationBulk Metallic Glasses and their Applications
Pages1-6
Number of pages6
DOIs
Publication statusPublished - 2011
Event2010 MRS Fall Meeting - Boston, MA, United States
Duration: 2010 Nov 292010 Dec 3

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1300
ISSN (Print)0272-9172

Other

Other2010 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period10/11/2910/12/3

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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