Fundamental investigation of influence of air compressibility on displacement control performances of aerostatic bearings

Yohichi Nakao, Daiki Fukui, Satsuki Yamazaki, Junpei Kusuyama, Dmytro Fedorynenko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper deals with displacement control of aerostatic bearings. Displacement of the aerostatic bearings can be controlled by controlling supplied air flow based on an appropriately designed feedback controller. The static characteristics of the designed feedback system were investigated experimentally. It is then shown that the positioning accuracy of the tested system was the tens of the nanometers. In addition, the influence of the air compressibility on the dynamic characteristics of the control system is investigated via simulation studies. The simulation studies reveal the air compressibility of the aerostatic bearings increases the time delay of response.

Original languageEnglish
Title of host publicationEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019
EditorsRichard K. Leach, D. Billington, C. Nisbet, D. Phillips
Publishereuspen
Pages560-561
Number of pages2
ISBN (Electronic)9780995775145
Publication statusPublished - 2019 Jan 1
Externally publishedYes
Event19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019 - Bilbao, Spain
Duration: 2019 Jun 32019 Jun 7

Publication series

NameEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

Conference

Conference19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019
CountrySpain
CityBilbao
Period19/6/319/6/7

Keywords

  • Aerostatic bearings
  • Air compressibility
  • Displacement control
  • Spindle
  • Ultra-precision machine tools

ASJC Scopus subject areas

  • Mechanical Engineering
  • Materials Science(all)
  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Environmental Engineering

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