Abstract
Functional probes such as a metal-tip cantilever and a glass-coated tungsten tip for scanning probe microscopy (SPM) were fabricated utilizing focused ion beam method. Using the functional probes, we obtained results which were hard to reach by usual SPM probes.
Original language | English |
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Article number | 005 |
Pages (from-to) | 22-25 |
Number of pages | 4 |
Journal | Journal of Physics: Conference Series |
Volume | 61 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2007 Apr 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)