Functional probes for scanning probe microscopy

K. Akiyama, T. Eguchi, T. An, Y. Fujikawa, T. Sakurai, Y. Hasegawa

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Functional probes such as a metal-tip cantilever and a glass-coated tungsten tip for scanning probe microscopy (SPM) were fabricated utilizing focused ion beam method. Using the functional probes, we obtained results which were hard to reach by usual SPM probes.

Original languageEnglish
Article number005
Pages (from-to)22-25
Number of pages4
JournalJournal of Physics: Conference Series
Issue number1
Publication statusPublished - 2007 Apr 1
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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