Abstract
A quartz-core cantilever fabricated from an optical fiber tip is proposed as a practical sensor for measurement of various physical quantities. Its operation is based on the principle that the resonance characteristics of the photothermally vibrated cantilever vary with the surrounding physical quantities. The cantilever is studied as a mechanical sensor for monitoring film thickness, liquid density and viscosity using a excitation vibration and detection system constructed solely of optical fiber. Thickness monitoring of Au film is possible with an accuracy of 0.5 nm up to a thickness of 500 nm. By utilizing the cantilever in liquid, the resonance frequency and half-power width dependence on the density and viscosity of the liquid were determined.
| Original language | English |
|---|---|
| Pages (from-to) | 105-110 |
| Number of pages | 6 |
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 120 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2000 |
Keywords
- optical sensor for physical quantities
- quartz-core cantilever
- thickness monitoring
- vibration detection
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering