From SOI wafer to micro electron field emission device with focus lenses

Phan Ngoc Minh, Takahito Ono, Nobuyuki Sato, Hidenori Mimura, Kuniyoshi Yokoo, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
Original languageEnglish
Title of host publicationTechnical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003
EditorsMikio Takai, Junzo Ishikawa, Yasuhito Gotoh
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages179-180
Number of pages2
ISBN (Electronic)4818195154, 9784818195158
DOIs
Publication statusPublished - 2003 Jan 1
Event16th International Vacuum Microelectronics Conference, IVMC 2003 - Toyonaka, Osaka, Japan
Duration: 2003 Jul 72003 Jul 11

Publication series

NameProceedings of the IEEE International Vacuum Microelectronics Conference, IVMC
Volume2003-January

Other

Other16th International Vacuum Microelectronics Conference, IVMC 2003
CountryJapan
CityToyonaka, Osaka
Period03/7/703/7/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Minh, P. N., Ono, T., Sato, N., Mimura, H., Yokoo, K., & Esashi, M. (2003). From SOI wafer to micro electron field emission device with focus lenses. In M. Takai, J. Ishikawa, & Y. Gotoh (Eds.), Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003 (pp. 179-180). [1223042] (Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC; Vol. 2003-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IVMC.2003.1223042