Frequency trimming of zno/glass saw filters

Michio Kadota, Chikashi Kondo, Toshiaki Ikeda, Toru Kasanami

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each Wfilter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of &4 W filters can be reduced tremendously.

Original languageEnglish
Pages (from-to)179-181
Number of pages3
JournalJapanese journal of applied physics
Volume30
DOIs
Publication statusPublished - 1991 Jan

Keywords

  • Frequency deviation
  • Frequency trimming
  • Mass production
  • Organic material
  • SAW filter
  • ZnO thin film

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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