Frequency trimming of zno/glass saw filters

Michio Kadota; Chikashi Kondo; Toshiaki Ikeda; Toru Kasanami

doi:10.7567/JJAPS.30S1.179

Frequency trimming of zno/glass saw filters

Michio Kadota, Chikashi Kondo, Toshiaki Ikeda, Toru Kasanami

ENG - Robotics

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each Wfilter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of &4 W filters can be reduced tremendously.

Original language	English
Pages (from-to)	179-181
Number of pages	3
Journal	Japanese journal of applied physics
Volume	30
DOIs	https://doi.org/10.7567/JJAPS.30S1.179
Publication status	Published - 1991 Jan

Keywords

Frequency deviation
Frequency trimming
Mass production
Organic material
SAW filter
ZnO thin film

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.7567/JJAPS.30S1.179

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title = "Frequency trimming of zno/glass saw filters",

abstract = "In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each Wfilter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of &4 W filters can be reduced tremendously.",

keywords = "Frequency deviation, Frequency trimming, Mass production, Organic material, SAW filter, ZnO thin film",

author = "Michio Kadota and Chikashi Kondo and Toshiaki Ikeda and Toru Kasanami",

year = "1991",

month = jan,

doi = "10.7567/JJAPS.30S1.179",

language = "English",

volume = "30",

pages = "179--181",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

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publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Frequency trimming of zno/glass saw filters

AU - Kadota, Michio

AU - Kondo, Chikashi

AU - Ikeda, Toshiaki

AU - Kasanami, Toru

PY - 1991/1

Y1 - 1991/1

N2 - In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each Wfilter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of &4 W filters can be reduced tremendously.

AB - In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each Wfilter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of &4 W filters can be reduced tremendously.

KW - Frequency deviation

KW - Frequency trimming

KW - Mass production

KW - Organic material

KW - SAW filter

KW - ZnO thin film

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M3 - Article

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EP - 181

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

ER -

Frequency trimming of zno/glass saw filters

Abstract

Keywords

ASJC Scopus subject areas

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