Frequency shift on a micromachined resonator excited photothermally in vacuum

K. Hane, T. Iwatuki, S. Inaba, S. Okuma

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

The photothermal activation of a micromachined resonator in vacuum is reported. The resonance frequency shift was obtained at the pressures in the viscosity flow region. This effect will be useful for the development of a miniature vacuum gauge operated optically.

Original languageEnglish
Pages (from-to)3781-3782
Number of pages2
JournalReview of Scientific Instruments
Volume63
Issue number7
DOIs
Publication statusPublished - 1992
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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