Frequency component analysis of back-reflected surface acoustic wave on diamond-coated silicon

Misung Son, Seo Jin Park, Sang Hyun Park, Jisu Kim, Young H. Kim, Toshihiko Abe, Toshiyuki Takagi

Research output: Contribution to journalArticle

Abstract

When ultrasound propagates on the surface of a layered substrate, the phase and group velocities of a surface acoustic wave (SAW) depend on the frequency, and the dispersion of the SAW can be obtained from its critical angles, for various frequencies. In the present work, a broadband SAW was generated by an oblique incident wave, and the wave reflected at the edge of a specimen was detected by a pulse-echo setup. Detected signals were decomposed into rf waveforms of different frequencies by digital filtering, and the critical angle was determined as a function of frequency. Two specimens with different coating thicknesses were investigated and the dispersion of the SAW was obtained. The results obtained in the present work showed good agreement with those in previous works.

Original languageEnglish
Pages (from-to)1767-1770
Number of pages4
JournalJapanese journal of applied physics
Volume47
Issue number3 PART 1
DOIs
Publication statusPublished - 2008 Mar 14

Keywords

  • Critical angle
  • Diamond coating
  • Dispersion
  • Layered substrate
  • Profile of filtered signal
  • SAW

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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    Son, M., Park, S. J., Park, S. H., Kim, J., Kim, Y. H., Abe, T., & Takagi, T. (2008). Frequency component analysis of back-reflected surface acoustic wave on diamond-coated silicon. Japanese journal of applied physics, 47(3 PART 1), 1767-1770. https://doi.org/10.1143/JJAP.47.1767