Frequency component analysis of back-reflected surface acoustic wave on diamond-coated silicon

Misung Son; Seo Jin Park; Sang Hyun Park; Jisu Kim; Young H. Kim; Toshihiko Abe; Toshiyuki Takagi

doi:10.1143/JJAP.47.1767

Frequency component analysis of back-reflected surface acoustic wave on diamond-coated silicon

Misung Son, Seo Jin Park, Sang Hyun Park, Jisu Kim, Young H. Kim, Toshihiko Abe, Toshiyuki Takagi

Innovative Energy Research Center

Research output: Contribution to journal › Article › peer-review

Abstract

When ultrasound propagates on the surface of a layered substrate, the phase and group velocities of a surface acoustic wave (SAW) depend on the frequency, and the dispersion of the SAW can be obtained from its critical angles, for various frequencies. In the present work, a broadband SAW was generated by an oblique incident wave, and the wave reflected at the edge of a specimen was detected by a pulse-echo setup. Detected signals were decomposed into rf waveforms of different frequencies by digital filtering, and the critical angle was determined as a function of frequency. Two specimens with different coating thicknesses were investigated and the dispersion of the SAW was obtained. The results obtained in the present work showed good agreement with those in previous works.

Original language	English
Pages (from-to)	1767-1770
Number of pages	4
Journal	Japanese journal of applied physics
Volume	47
Issue number	3 PART 1
DOIs	https://doi.org/10.1143/JJAP.47.1767
Publication status	Published - 2008 Mar 14

Keywords

Critical angle
Diamond coating
Dispersion
Layered substrate
Profile of filtered signal
SAW

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "Frequency component analysis of back-reflected surface acoustic wave on diamond-coated silicon",

abstract = "When ultrasound propagates on the surface of a layered substrate, the phase and group velocities of a surface acoustic wave (SAW) depend on the frequency, and the dispersion of the SAW can be obtained from its critical angles, for various frequencies. In the present work, a broadband SAW was generated by an oblique incident wave, and the wave reflected at the edge of a specimen was detected by a pulse-echo setup. Detected signals were decomposed into rf waveforms of different frequencies by digital filtering, and the critical angle was determined as a function of frequency. Two specimens with different coating thicknesses were investigated and the dispersion of the SAW was obtained. The results obtained in the present work showed good agreement with those in previous works.",

keywords = "Critical angle, Diamond coating, Dispersion, Layered substrate, Profile of filtered signal, SAW",

author = "Misung Son and Park, {Seo Jin} and Park, {Sang Hyun} and Jisu Kim and Kim, {Young H.} and Toshihiko Abe and Toshiyuki Takagi",

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doi = "10.1143/JJAP.47.1767",

language = "English",

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AU - Son, Misung

AU - Park, Seo Jin

AU - Park, Sang Hyun

AU - Kim, Jisu

AU - Kim, Young H.

AU - Abe, Toshihiko

AU - Takagi, Toshiyuki

PY - 2008/3/14

Y1 - 2008/3/14

N2 - When ultrasound propagates on the surface of a layered substrate, the phase and group velocities of a surface acoustic wave (SAW) depend on the frequency, and the dispersion of the SAW can be obtained from its critical angles, for various frequencies. In the present work, a broadband SAW was generated by an oblique incident wave, and the wave reflected at the edge of a specimen was detected by a pulse-echo setup. Detected signals were decomposed into rf waveforms of different frequencies by digital filtering, and the critical angle was determined as a function of frequency. Two specimens with different coating thicknesses were investigated and the dispersion of the SAW was obtained. The results obtained in the present work showed good agreement with those in previous works.

AB - When ultrasound propagates on the surface of a layered substrate, the phase and group velocities of a surface acoustic wave (SAW) depend on the frequency, and the dispersion of the SAW can be obtained from its critical angles, for various frequencies. In the present work, a broadband SAW was generated by an oblique incident wave, and the wave reflected at the edge of a specimen was detected by a pulse-echo setup. Detected signals were decomposed into rf waveforms of different frequencies by digital filtering, and the critical angle was determined as a function of frequency. Two specimens with different coating thicknesses were investigated and the dispersion of the SAW was obtained. The results obtained in the present work showed good agreement with those in previous works.

KW - Critical angle

KW - Diamond coating

KW - Dispersion

KW - Layered substrate

KW - Profile of filtered signal

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Frequency component analysis of back-reflected surface acoustic wave on diamond-coated silicon

Abstract

Keywords

ASJC Scopus subject areas

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