Freestanding multifunctional micro fluidic system for highly sensitive thermal detection

Zhuqing Wang, Mitsuteru Kimura, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This research has proposed a new micro fluidic system fabrication method for freestanding multifunctional thermal detection using MEMS technology. The fabricated SU-8 polymer-based microfluidic reactive chamber allows small volume and compact structure. The fabricated multifunctional thermal sensor integrated with freestanding fluidic system with thermocouple structure shows a high sensitivity. The results demonstrate that the proposed fabrication method of freestanding multifunctional micro fluidic system is capable of enzyme-catalyzed reaction detection for healthcare application.

Original languageEnglish
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages555-558
Number of pages4
ISBN (Electronic)9781510897571
Publication statusPublished - 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan, Province of China
Duration: 2018 Nov 112018 Nov 15

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume1

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
CountryTaiwan, Province of China
CityKaohsiung
Period18/11/1118/11/15

Keywords

  • Freestanding micro fluidic system
  • Multifunctional
  • Thermal detection
  • Thermal sensor

ASJC Scopus subject areas

  • Chemistry(all)
  • Bioengineering
  • Chemical Engineering (miscellaneous)
  • Control and Systems Engineering

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  • Cite this

    Wang, Z., Kimura, M., & Ono, T. (2018). Freestanding multifunctional micro fluidic system for highly sensitive thermal detection. In 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 (pp. 555-558). (22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018; Vol. 1). Chemical and Biological Microsystems Society.