Freestanding individual single-walled carbon nanotube synthesis based on plasma sheath effects

Toshiaki Kato; Goo Hwan Jeong; Takamichi Hirata; Rikizo Hatakeyama; Kazuyuki Tohji

doi:10.1143/JJAP.43.L1278

Freestanding individual single-walled carbon nanotube synthesis based on plasma sheath effects

Toshiaki Kato, Goo Hwan Jeong, Takamichi Hirata, Rikizo Hatakeyama, Kazuyuki Tohji

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

We report the successful synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) at relatively low temperatures below 650°C using very short-time (30 s) plasma-enhanced chemical vapor deposition (PECVD) process. Based on the detailed transmission electron microscopy observation, it is revealed that all of the short-length SWNTs growing from catalysts which are fixed by zeolites form individual shapes. According to the comparison between general PECVD and our PECVD, several requirements for the SWNT growth under PECVD are claimed.

Original language	English
Pages (from-to)	L1278-L1280
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	43
Issue number	10 A
DOIs	https://doi.org/10.1143/JJAP.43.L1278
Publication status	Published - 2004 Oct 1

Keywords

Freestanding
Low-temper-ature synthesis
Plasma-enhanced chemical vapor deposition
Single-walled carbon nanotube
Zeolite

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.43.L1278

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abstract = "We report the successful synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) at relatively low temperatures below 650°C using very short-time (30 s) plasma-enhanced chemical vapor deposition (PECVD) process. Based on the detailed transmission electron microscopy observation, it is revealed that all of the short-length SWNTs growing from catalysts which are fixed by zeolites form individual shapes. According to the comparison between general PECVD and our PECVD, several requirements for the SWNT growth under PECVD are claimed.",

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AU - Kato, Toshiaki

AU - Jeong, Goo Hwan

AU - Hirata, Takamichi

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AU - Tohji, Kazuyuki

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AB - We report the successful synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) at relatively low temperatures below 650°C using very short-time (30 s) plasma-enhanced chemical vapor deposition (PECVD) process. Based on the detailed transmission electron microscopy observation, it is revealed that all of the short-length SWNTs growing from catalysts which are fixed by zeolites form individual shapes. According to the comparison between general PECVD and our PECVD, several requirements for the SWNT growth under PECVD are claimed.

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KW - Low-temper-ature synthesis

KW - Plasma-enhanced chemical vapor deposition

KW - Single-walled carbon nanotube

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Freestanding individual single-walled carbon nanotube synthesis based on plasma sheath effects

Abstract

Keywords

ASJC Scopus subject areas

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