Abstract
We report the successful synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) at relatively low temperatures below 650°C using very short-time (30 s) plasma-enhanced chemical vapor deposition (PECVD) process. Based on the detailed transmission electron microscopy observation, it is revealed that all of the short-length SWNTs growing from catalysts which are fixed by zeolites form individual shapes. According to the comparison between general PECVD and our PECVD, several requirements for the SWNT growth under PECVD are claimed.
Original language | English |
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Pages (from-to) | L1278-L1280 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 43 |
Issue number | 10 A |
DOIs | |
Publication status | Published - 2004 Oct 1 |
Keywords
- Freestanding
- Low-temper-ature synthesis
- Plasma-enhanced chemical vapor deposition
- Single-walled carbon nanotube
- Zeolite
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)