Formation of slit-like voids at trench corners of damascene Cu interconnects

Atsuko Sekiguchi, Junichi Koike, Kouichi Maruyama

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Fingerprint Dive into the research topics of 'Formation of slit-like voids at trench corners of damascene Cu interconnects'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science