Formation of polar phase in Fe-doped ZrO 2 epitaxial thin films

S. Choi, T. Shiraishi, T. Kiguchi, T. Shimizu, H. Funakubo, T. J. Konno

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6 Citations (Scopus)


The existence of a polar phase in epitaxially grown Fe-doped ZrO 2 thin films has been demonstrated. The films were prepared on yttria-stabilized zirconia substrates by ion-beam sputtering and subsequent annealing, where the composition was controlled by changing the FeO 1.5 -ZrO 2 ratio of the sputtering target. The chemical states of elements in the 30 nm-thick xFeO 1.5 -(1-x)ZrO 2 thin films (x = 0, 0.06, 0.10, and 0.14 nominal composition) have been measured by X-ray photoelectron spectroscopy, and the crystal structure has been examined by using X-ray diffraction and scanning transmission electron microscopy. These observations revealed that the undoped ZrO 2 thin film (x = 0) is dominated by the monoclinic phase (space group: P2 1 /c), while the films containing Fe exhibit multi-domain structures consisting of monoclinic and orthorhombic (Pbc2 1 ) phases, the latter being a polar phase, showing that the orthorhombic phase is stabilized by the addition of Fe. Concurrently, the polarization-electric field loops of the Fe-doped films exhibited hysteresis for the film with x = 0.06.

Original languageEnglish
Article number262903
JournalApplied Physics Letters
Issue number26
Publication statusPublished - 2018 Dec 24

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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