Abstract
The polysilsesquioxane (PSQ) is an organometallic polymer consisting of Si-O-Si cage structure and organic side chains. The PSQ has attracted much attention because of the high transparency and the excellent heat-resisting property. The purpose of our study is the functionalization of the PSQ. In this paper, we report the micropatterning of organic-inorganic films consisting of multifunctional double-decker (DD) type silsesquioxane and the polymer. The micropatterning of the film was achieved by application of the phosensitive sol-gel reaction using titanium methacrylate triisopropoxide (TMTP) and benzoyl acetone (BA). The micro-pattern with ca. 1 μm resolution was obtained by UV-irradiation through photomask on the hybrid film consisting of DD silanol, TMTP, and BA.
Original language | English |
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Number of pages | 1 |
Publication status | Published - 2006 Oct 19 |
Event | 55th SPSJ Annual Meeting - Nagoya, Japan Duration: 2006 May 24 → 2006 May 26 |
Other
Other | 55th SPSJ Annual Meeting |
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Country/Territory | Japan |
City | Nagoya |
Period | 06/5/24 → 06/5/26 |
Keywords
- Micropatterning
- Organic-inroganic hybrid
- Silsesquioxane
ASJC Scopus subject areas
- Engineering(all)