Formation of organic-inorganic hybrid films based on silsesquioxane

Akira Watanabe, Tokuji Miyashita

Research output: Contribution to conferencePaperpeer-review


The polysilsesquioxane (PSQ) is an organometallic polymer consisting of Si-O-Si cage structure and organic side chains. The PSQ has attracted much attention because of the high transparency and the excellent heat-resisting property. The purpose of our study is the functionalization of the PSQ. In this paper, we report the micropatterning of organic-inorganic films consisting of multifunctional double-decker (DD) type silsesquioxane and the polymer. The micropatterning of the film was achieved by application of the phosensitive sol-gel reaction using titanium methacrylate triisopropoxide (TMTP) and benzoyl acetone (BA). The micro-pattern with ca. 1 μm resolution was obtained by UV-irradiation through photomask on the hybrid film consisting of DD silanol, TMTP, and BA.

Original languageEnglish
Number of pages1
Publication statusPublished - 2006 Oct 19
Event55th SPSJ Annual Meeting - Nagoya, Japan
Duration: 2006 May 242006 May 26


Other55th SPSJ Annual Meeting


  • Micropatterning
  • Organic-inroganic hybrid
  • Silsesquioxane

ASJC Scopus subject areas

  • Engineering(all)


Dive into the research topics of 'Formation of organic-inorganic hybrid films based on silsesquioxane'. Together they form a unique fingerprint.

Cite this