Formation of Mn oxide with thermal CVD and its diffusion barrier property between Cu and SiO2

Koji Neishi, Shiro Aki, Jun Iijirna, Junichi Koike

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Formation of Mn oxide with thermal CVD and its diffusion barrier property between Cu and SiO<sub>2</sub>'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy