Formation of highly uniform and dense diamond microcrystal thin films using a combustion flame surrounded by an inert-gas flow

Toshimi Abe, Maki Suemitsu, Nobuo Miyamoto

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

An inert-gas curtain method, in which a combustion flame of oxygen/acetylene mixture is protected from the air by a surrounding inert-gas flow, has been developed for the deposition of microcrystalline diamond films. As a result, highly uniform and highly dense microcrystal films of diamonds possessing the quality of natural diamond were successfully prepared. The inert-gas flow allows the hydrocarbon radicals in the flame to be varied for preferential deposition of diamonds.

Original languageEnglish
Pages (from-to)3531-3533
Number of pages3
JournalJournal of Applied Physics
Volume74
Issue number5
DOIs
Publication statusPublished - 1993 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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