Formation of highly uniform and dense diamond microcrystal thin films using a combustion flame surrounded by an inert-gas flow

Toshimi Abe; Maki Suemitsu; Nobuo Miyamoto

doi:10.1063/1.354530

Formation of highly uniform and dense diamond microcrystal thin films using a combustion flame surrounded by an inert-gas flow

Toshimi Abe, Maki Suemitsu, Nobuo Miyamoto

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Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

An inert-gas curtain method, in which a combustion flame of oxygen/acetylene mixture is protected from the air by a surrounding inert-gas flow, has been developed for the deposition of microcrystalline diamond films. As a result, highly uniform and highly dense microcrystal films of diamonds possessing the quality of natural diamond were successfully prepared. The inert-gas flow allows the hydrocarbon radicals in the flame to be varied for preferential deposition of diamonds.

Original language	English
Pages (from-to)	3531-3533
Number of pages	3
Journal	Journal of Applied Physics
Volume	74
Issue number	5
DOIs	https://doi.org/10.1063/1.354530
Publication status	Published - 1993 Dec 1

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.354530

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