Formation of freestanding single-walled carbon nanotubes by plasma-enhanced CVD

Toshiaki Kato, Rikizo Hatakeyama

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

Freestanding individual single-walled carbon nanotubes (SWNTs) are successfully produced using plasma-enhanced (PE)CVD. The quantitative effects of plasmas on SWNT growth are also discussed on the basis of detailed plasma measure-ments and simple calculations. According to these quantitative results, it is found that the plasma sheath effectively plays the role of driving force in making individual SWNTs stand vertically on a substrate surface. This three-dimensional alignment control of individual SWNTs based on plasma science and technology has huge potential to create a new type of architecture for future nanotube devices.

Original languageEnglish
Pages (from-to)345-352
Number of pages8
JournalChemical Vapor Deposition
Volume12
Issue number6
DOIs
Publication statusPublished - 2006 Jun 1

Keywords

  • Diffusion plasma
  • Freestanding structures
  • PECVD
  • Plasma sheath
  • SWNTs

ASJC Scopus subject areas

  • Chemistry(all)
  • Surfaces and Interfaces
  • Process Chemistry and Technology

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