Formation of diamond-like carbon films by photoemission-assisted plasma-enhanced chemical vapor deposition

Meng Yang, Susumu Takabayashi, Shuichi Ogawa, Hiroyuki Hayashi, Radek Ješko, Taiichi Otsuji, Yuji Takakuwa

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy