Formation of cubic-AlN layer on MgO(1 0 0) substrate

Soichiro Okubo; Noriyoshi Shibata; Tomohiro Saito; Yuichi Ikuhara

doi:10.1016/S0022-0248(98)00329-7

Formation of cubic-AlN layer on MgO(1 0 0) substrate

Soichiro Okubo, Noriyoshi Shibata, Tomohiro Saito, Yuichi Ikuhara

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

Epitaxial cubic(c)-AlN(1 0 0) layer has been formed at an interface between hexagonal(h)-AlN film and MgO(1 0 0) substrate by molecular beam epitaxy assisted with electron-cyclotron-resonance plasma excitation. The c-AlN layer observed by TEM was as thin as 3-4 nm. The h-AlN film was 〈1 0 1〉-oriented polycrystalline. On the other hand, epitaxial h-AlN(0 0 1) film has been grown directly on MgO(1 1 1) substrate with the epitaxial relationships of AlN[0 1 0] ∥ MgO[1 1 2] and A1N[2 1 0] ∥ MgO[1 1 0].

Original language	English
Pages (from-to)	452-456
Number of pages	5
Journal	Journal of Crystal Growth
Volume	189-190
DOIs	https://doi.org/10.1016/S0022-0248(98)00329-7
Publication status	Published - 1998 Jun 15

Keywords

AlN
Ion-assisted MBE
MgO
RHEED
TEM
Thin film

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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10.1016/S0022-0248(98)00329-7

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@article{e056c3cadcc24c94a6247949b833c4ca,

title = "Formation of cubic-AlN layer on MgO(1 0 0) substrate",

abstract = "Epitaxial cubic(c)-AlN(1 0 0) layer has been formed at an interface between hexagonal(h)-AlN film and MgO(1 0 0) substrate by molecular beam epitaxy assisted with electron-cyclotron-resonance plasma excitation. The c-AlN layer observed by TEM was as thin as 3-4 nm. The h-AlN film was 〈1 0 1〉-oriented polycrystalline. On the other hand, epitaxial h-AlN(0 0 1) film has been grown directly on MgO(1 1 1) substrate with the epitaxial relationships of AlN[0 1 0] ∥ MgO[1 1 2] and A1N[2 1 0] ∥ MgO[1 1 0].",

keywords = "AlN, Ion-assisted MBE, MgO, RHEED, TEM, Thin film",

author = "Soichiro Okubo and Noriyoshi Shibata and Tomohiro Saito and Yuichi Ikuhara",

year = "1998",

month = jun,

day = "15",

doi = "10.1016/S0022-0248(98)00329-7",

language = "English",

volume = "189-190",

pages = "452--456",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

}

TY - JOUR

T1 - Formation of cubic-AlN layer on MgO(1 0 0) substrate

AU - Okubo, Soichiro

AU - Shibata, Noriyoshi

AU - Saito, Tomohiro

AU - Ikuhara, Yuichi

PY - 1998/6/15

Y1 - 1998/6/15

N2 - Epitaxial cubic(c)-AlN(1 0 0) layer has been formed at an interface between hexagonal(h)-AlN film and MgO(1 0 0) substrate by molecular beam epitaxy assisted with electron-cyclotron-resonance plasma excitation. The c-AlN layer observed by TEM was as thin as 3-4 nm. The h-AlN film was 〈1 0 1〉-oriented polycrystalline. On the other hand, epitaxial h-AlN(0 0 1) film has been grown directly on MgO(1 1 1) substrate with the epitaxial relationships of AlN[0 1 0] ∥ MgO[1 1 2] and A1N[2 1 0] ∥ MgO[1 1 0].

AB - Epitaxial cubic(c)-AlN(1 0 0) layer has been formed at an interface between hexagonal(h)-AlN film and MgO(1 0 0) substrate by molecular beam epitaxy assisted with electron-cyclotron-resonance plasma excitation. The c-AlN layer observed by TEM was as thin as 3-4 nm. The h-AlN film was 〈1 0 1〉-oriented polycrystalline. On the other hand, epitaxial h-AlN(0 0 1) film has been grown directly on MgO(1 1 1) substrate with the epitaxial relationships of AlN[0 1 0] ∥ MgO[1 1 2] and A1N[2 1 0] ∥ MgO[1 1 0].

KW - AlN

KW - Ion-assisted MBE

KW - MgO

KW - RHEED

KW - TEM

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=0032090754&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032090754&partnerID=8YFLogxK

U2 - 10.1016/S0022-0248(98)00329-7

DO - 10.1016/S0022-0248(98)00329-7

M3 - Article

AN - SCOPUS:0032090754

VL - 189-190

SP - 452

EP - 456

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

SN - 0022-0248

ER -

Formation of cubic-AlN layer on MgO(1 0 0) substrate

Abstract

Keywords

ASJC Scopus subject areas

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