Formation of channel waveguide with grating in polymer films based on simultaneous photobleaching and embossing

S. Shibata, O. Sugihara, Y. Che, H. Fujimura, C. Egami, N. Okamoto

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

Channel waveguide with grating is fabricated in nonlinear optical (NLO) polymer thin films by means of simultaneous embossing and photobleaching. A combined structure of mask/master consisting of a photomask part and a grating die part which is made of polyimide is fabricated. Then the mask/master is set on the NLO polymer films and both embossing and photobleaching are performed simultaneously. Profiles of the replica grating and the channel waveguide are estimated.

Original languageEnglish
Pages (from-to)495-498
Number of pages4
JournalOptical Materials
Volume21
Issue number1-3
DOIs
Publication statusPublished - 2003 Jan

Keywords

  • Channel waveguide
  • Grating
  • Mask/master
  • Nonlinear optical polymer
  • Replica

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Computer Science(all)
  • Atomic and Molecular Physics, and Optics
  • Spectroscopy
  • Physical and Theoretical Chemistry
  • Organic Chemistry
  • Inorganic Chemistry
  • Electrical and Electronic Engineering

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