Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing

Takanori Mimura, Kiliha Katayama, Takao Shimizu, Hiroshi Uchida, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, Hiroshi Funakubo

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24 Citations (Scopus)

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Physics & Astronomy