Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition

T. Kato, T. Hirata, G. H. Jeong, R. Hatakeyama, K. Tohji

Research output: Contribution to conferencePaperpeer-review

Abstract

We report a successful SWNT formation using plasma-enhanced chemical vapor deposition (PECVD) method. To the best of our knowledge it is the first report concerning the SWNT formation by PECVD. An appropriate mixture ratio of source gasses under the plasma discharge enables SWNT synthesis temperature to be lowered below 550°C. Furthermore, it is also achieved to control vertical alignment of individual SWNT by restraining the plasma treatment time to very short time.

Original languageEnglish
Pages10-17
Number of pages8
Publication statusPublished - 2004 Dec 1
EventECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters - San Antonio, TX, United States
Duration: 2004 May 92004 May 13

Other

OtherECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters
CountryUnited States
CitySan Antonio, TX
Period04/5/904/5/13

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition'. Together they form a unique fingerprint.

Cite this