TY - GEN
T1 - Form error characterization of reflective-type gratings
AU - Shimizu, Yuki
AU - Kim, Woo Jae
AU - Ito, So
AU - Gao, Wei
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - A form error characterization of a reflective-type scale grating, which is used in three-degree-of-freedom (3-DOF) encoders for position measurement of a planar motion stage, is presented. The scale grating has a micro-structured surface, the pitch of which is 1 μm in both Xand Y- direction. The periodic pattern on the scale grating generates diffracted beams when a laser beam incidents to the grating surface. The ±1st order diffracted beams from the grating contain information about the stage motions of not only X- or Y- directional in-plane displacement but also Z-directional out-of-plane displacement, and are therefore able to be utilized for multi-axis position detection. Accuracies of the position detection are mainly determined by a period deviation and a Z-directional out-of-flatness of the scale grating. The form error characterization of the grating is possible by using Fizeau interferometer, although the form error of a reference mirror in the Fizeau interferometer still remains as a measurement error in the form of the measured scale grating. In this paper, a new method was proposed to evaluate the form error characterization of the scale grating for the 3-DOF encoder, while eliminating the form error of the reference mirror in the Fizeau interferometer.
AB - A form error characterization of a reflective-type scale grating, which is used in three-degree-of-freedom (3-DOF) encoders for position measurement of a planar motion stage, is presented. The scale grating has a micro-structured surface, the pitch of which is 1 μm in both Xand Y- direction. The periodic pattern on the scale grating generates diffracted beams when a laser beam incidents to the grating surface. The ±1st order diffracted beams from the grating contain information about the stage motions of not only X- or Y- directional in-plane displacement but also Z-directional out-of-plane displacement, and are therefore able to be utilized for multi-axis position detection. Accuracies of the position detection are mainly determined by a period deviation and a Z-directional out-of-flatness of the scale grating. The form error characterization of the grating is possible by using Fizeau interferometer, although the form error of a reference mirror in the Fizeau interferometer still remains as a measurement error in the form of the measured scale grating. In this paper, a new method was proposed to evaluate the form error characterization of the scale grating for the 3-DOF encoder, while eliminating the form error of the reference mirror in the Fizeau interferometer.
KW - Interferometer
KW - Linear encoder
KW - Out-of-flatness
KW - Period deviation
KW - Scale grating
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U2 - 10.4028/www.scientific.net/KEM.523-524.859
DO - 10.4028/www.scientific.net/KEM.523-524.859
M3 - Conference contribution
AN - SCOPUS:84870594880
SN - 9783037855096
T3 - Key Engineering Materials
SP - 859
EP - 864
BT - Emerging Technology in Precision Engineering XIV
PB - Trans Tech Publications Ltd
T2 - 14th International Conference on Precision Engineering, ICPE 2012
Y2 - 8 November 2012 through 10 November 2012
ER -