FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed here could drastically reduce the both angular rate and angle error induced by interference between two oscillation modes. The scale factors were measured as high as about 0.73 having a quite small temperature dependency.

Original languageEnglish
Title of host publication4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781509032334
DOIs
Publication statusPublished - 2017 May 30
Event4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Kauai, United States
Duration: 2017 Mar 272017 Mar 30

Publication series

Name4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

Other

Other4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017
CountryUnited States
CityKauai
Period17/3/2717/3/30

ASJC Scopus subject areas

  • Instrumentation

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