Fluorine-ion-implanted air-bearing surface for low-friction head-disk interface

Yuki Shimizu, Noritsugu Umehara, Junguo Xu

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


With the aim of reducing the lubricant-slider interaction by reducing slider surface energy, we fabricated several types of sliders with fluorine-ion-implanted (FII) air-bearing surfaces by using different levels of acceleration voltage for FII. With a low acceleration voltage, the fluorine-ions tended to be concentrated at shallower depths from the slider surface, and the contact angle of the water droplets was greater. The FII-treated slider showed lower touch-down height, which implies an improvement of slider stability at near-contact regime. The polar force component of the surface energy of FII-treated slider surface showed a good correlation with a thermally flying-height control heater power at touch-down. It is estimated that FII-treatment can reduce the polar force component of the surface energy and reduce the slider-lubricant interaction, resulting in a reduction of slider touch-down height.

Original languageEnglish
Pages (from-to)293-299
Number of pages7
JournalMicrosystem Technologies
Issue number1-2
Publication statusPublished - 2010 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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