Fluorinated amorphous carbon thin films for multilevel interconnections of integrated circuits

Toru Tatsumi, Kazuhiko Endo

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Fluorinated amorphous carbon thin films (a-C:F) for low-dielectric-constant interlayer dielectrics were deposited by helicon-wave plasma-enhanced chemical vapor deposition using fluorocarbon compounds as a source material. The a-C:F films could be grown from C4F8 at a high deposition rate (above 400 nm/min) and they were thermally stable up to 300°C. The addition of bias power to the substrate made it possible to completely fill gaps in the wiring (space 0.35 μm, height 0.65 μm) with the a-C:F film. To protect the a-C:F film during further processing, we deposited a SiO2 film to add mechanical strength and resistance to the oxygen plasma used to remove resist materials. The adhesion between the a-C:F and SiO2 films was dramatically improved by inserting an adhesion promoter consisting of a-C:H and Si-rich SiO2.

Original languageEnglish
Pages (from-to)193-198
Number of pages6
JournalJournal of Photopolymer Science and Technology
Volume12
Issue number2
DOIs
Publication statusPublished - 1999
Externally publishedYes

Keywords

  • Fluorinated amorphous carbon
  • Low-dielectric-constant interlayer dielectrics
  • Multilevel interconnection
  • Plasma enhanced chemical vapor deposition

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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