Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric

Kazuhiko Endo

Research output: Contribution to journal › Article › peer-review

ASJC Scopus subject areas

@article{474e10cdbf234463b85324544903da6c,

title = "Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric",

author = "Kazuhiko Endo",

year = "1997",

month = oct,

doi = "10.1557/S0883769400034217",

language = "English",

volume = "22",

pages = "55--58",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Materials Research Society",

number = "10",

}

TY - JOUR

T1 - Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric

AU - Endo, Kazuhiko

PY - 1997/10

Y1 - 1997/10

UR - http://www.scopus.com/inward/record.url?scp=0031256187&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031256187&partnerID=8YFLogxK

U2 - 10.1557/S0883769400034217

DO - 10.1557/S0883769400034217

M3 - Article

AN - SCOPUS:0031256187

VL - 22

SP - 55

EP - 58

JO - MRS Bulletin

JF - MRS Bulletin

SN - 0883-7694

IS - 10

ER -