Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric

Research output: Contribution to journalArticle

52 Citations (Scopus)
Original languageEnglish
Pages (from-to)55-58
Number of pages4
JournalMRS Bulletin
Volume22
Issue number10
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this