Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric

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@article{474e10cdbf234463b85324544903da6c,

title = "Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric",

author = "Kazuhiko Endo",

year = "1997",

month = jan,

day = "1",

doi = "10.1557/S0883769400034217",

language = "English",

volume = "22",

pages = "55--58",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Materials Research Society",

number = "10",

}

TY - JOUR

T1 - Fluorinated amorphous carbon as a low-dielectric-constant interlayer dielectric

AU - Endo, Kazuhiko

PY - 1997/1/1

Y1 - 1997/1/1

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U2 - 10.1557/S0883769400034217

DO - 10.1557/S0883769400034217

M3 - Article

AN - SCOPUS:0031256187

VL - 22

SP - 55

EP - 58

JO - MRS Bulletin

JF - MRS Bulletin

SN - 0883-7694

IS - 10

ER -