Fluoride single crystals for the next generation lithography

Teruhiko Nawata, Yoji Inui, Toshiro Mabuchi, Naoto Mochizuki, Isao Masada, Eiichi Nishijinia, Hiroki Sato, Tsuguo Fukuda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fluoride single crystals for the next generation lithography'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds