TY - JOUR
T1 - Fluorescence imprint alignment using additive-type inclination moiré fringes
AU - Yoshida, Takuma
AU - Ito, Shunya
AU - Ochiai, Kento
AU - Nakamura, Takahiro
AU - Nakagawa, Masaru
N1 - Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/6/1
Y1 - 2020/6/1
N2 - It was studied whether additive-type fluorescence inclination moiré fringes were observed during imprint alignment by fluorescence microscopy using a pair of two periodical concave-line patterns with a long and short pitch of p 1 and p 2 prepared on silica mold and silicon substrate surfaces without any optically functional layer. A fluorescent liquid was sandwiched between the surfaces to fill into the concave lines and excited by exposure to visible light of 530-538 nm. In the detection wavelength range of 570-700 nm, additive-type fluorescence inclination moiré fringes generated from the place where bright concave lines with p 1 on the substrate were overlaid with bright concave lines with p 2 on the mold. The relationship of the mold-substrate angle deviation (θ) with the angle deviation (ψ) of an additive-type inclination moiré fringe was equal to the correlation of θ with the angle deviation (φ) of a multiplicative-type inclination moiré fringe.
AB - It was studied whether additive-type fluorescence inclination moiré fringes were observed during imprint alignment by fluorescence microscopy using a pair of two periodical concave-line patterns with a long and short pitch of p 1 and p 2 prepared on silica mold and silicon substrate surfaces without any optically functional layer. A fluorescent liquid was sandwiched between the surfaces to fill into the concave lines and excited by exposure to visible light of 530-538 nm. In the detection wavelength range of 570-700 nm, additive-type fluorescence inclination moiré fringes generated from the place where bright concave lines with p 1 on the substrate were overlaid with bright concave lines with p 2 on the mold. The relationship of the mold-substrate angle deviation (θ) with the angle deviation (ψ) of an additive-type inclination moiré fringe was equal to the correlation of θ with the angle deviation (φ) of a multiplicative-type inclination moiré fringe.
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U2 - 10.35848/1347-4065/ab7415
DO - 10.35848/1347-4065/ab7415
M3 - Article
AN - SCOPUS:85083321722
VL - 59
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - SI
M1 - SIIJ04
ER -