Fluorescence imprint alignment using additive-type inclination moiré fringes

It was studied whether additive-type fluorescence inclination moiré fringes were observed during imprint alignment by fluorescence microscopy using a pair of two periodical concave-line patterns with a long and short pitch of p ₁ and p ₂ prepared on silica mold and silicon substrate surfaces without any optically functional layer. A fluorescent liquid was sandwiched between the surfaces to fill into the concave lines and excited by exposure to visible light of 530-538 nm. In the detection wavelength range of 570-700 nm, additive-type fluorescence inclination moiré fringes generated from the place where bright concave lines with p ₁ on the substrate were overlaid with bright concave lines with p ₂ on the mold. The relationship of the mold-substrate angle deviation (θ) with the angle deviation (ψ) of an additive-type inclination moiré fringe was equal to the correlation of θ with the angle deviation (φ) of a multiplicative-type inclination moiré fringe.