Flow energy control of nitrogen ions generated by electron cyclotron resonance

Research output: Contribution to journalArticle

Abstract

The flow energy of nitrogen ions produced by an electron cyclotron resonance (ECR) discharge is controlled by electrostatic acceleration in a plasma synthesis method. The source consists of an ion production region using ECR and a plasma synthesis region. Two grids for potential control and electron reflection of the ion production region, and an electron emitter with mesh shape are installed. In the synthesis region, electrons emitted from the emitter and ions accelerated by electrostatic potential difference between these regions are synthesized, which yields the generation of ion flow in the synthesis region. The electron temperature in the plasma synthesis region can be reduced to about 0.5 eV because of a reflection of high-energy electrons in the ion production region and a supply of thermionic electrons. In addition, it is observed that the density ratio of nitrogen atomic to molecular ions in the synthesis region markedly increases compared with that in the ion production region.

Original languageEnglish
Pages (from-to)8050-8054
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number10 B
DOIs
Publication statusPublished - 2006 Oct 21

Keywords

  • Electron cyclotron resonance
  • Electron temperature
  • Ion flow energy
  • Nitrogen plasma

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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