Abstract
A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB/m.
| Original language | English |
|---|---|
| Pages (from-to) | 1226-1228 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 23 |
| Issue number | 15 |
| DOIs | |
| Publication status | Published - 1998 Aug 1 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics