Abstract
A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB/m.
Original language | English |
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Pages (from-to) | 1226-1228 |
Number of pages | 3 |
Journal | Optics Letters |
Volume | 23 |
Issue number | 15 |
DOIs | |
Publication status | Published - 1998 Aug 1 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics