Filtering peripheral high temperature electrons in a cylindrical rf-driven plasmas by an axisymmetric radial magnetic field

Hikaru Akahoshi, Kazunori Takahashi, Akira Ando

Research output: Contribution to journalArticlepeer-review

Abstract

High temperature electrons generated near a radial wall of a cylindrical source tube in a radiofrequency (rf) inductively-coupled plasma is filtered by an axisymmetric radial magnetic field formed near the source exit by locating annular permanent magnets, where the axial magnetic field strength in the radially central region is fairly uniform inside the source tube and is close to zero near the source exit. The source is operated at 3 mTorr in argon and the rf antenna is powered by a 13.56 MHz and 400 W rf generator. Measurement of electron energy probability functions shows the presence of the peripheral high temperature electrons inside the source, while the temperature of the peripheral electrons downstream of the source is observed to be reduced.

Original languageEnglish
Article number035208
JournalAIP Advances
Volume8
Issue number3
DOIs
Publication statusPublished - 2018 Mar 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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