AlN has been grown on the (0001) basal and (11-00) prism faces of 6H-SiC. High resolution transmission electron microscopy studies show that, despite the very different symmetries of these two substrate planes and their polar and nonpolar natures, the film/substrate orientation relationship is identical for both systems. It is shown that this result is consistent with a geometrical method recently proposed for determining the orientation relationship between two crystals in a bicrystal.
ASJC Scopus subject areas
- Physics and Astronomy(all)