Abstract
SrTiO3 films were synthesized by spray pyrolysis in combination with a high-temperature inductively-coupled plasma (ICP) as the heat source (spray-ICP technique). Sapphire and fused quartz were used as substrates. Ten minutes of film formation yielded films of 0.5-1.0 μm in thickness. The structure of the films consisted of crystallites about 0.1 μm in size. With respect to the homogeneity of the size and shape of the crystallites, sapphire is superior over fused quartz. X-ray diffraction measurements of the films revealed preferred orientation peaks of (2 0 0), (1 1 1), and (1 1 0) depending on the substrates and their locations from the ICP source.
Original language | English |
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Pages (from-to) | 216-219 |
Number of pages | 4 |
Journal | Journal of Alloys and Compounds |
Volume | 440 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 2007 Aug 16 |
Keywords
- Film growth
- Spray-ICP technique
- SrTiO
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
- Materials Chemistry